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Plasma diagnostics of magnetron sputtering for deposition of nanostructured films

Bachelor thesis project: students applied and experimental physics

Magnetron sputtering is a processing technique for the deposition of a variety of coatings for a broad range of applications. In general, highly dense coatings are desired, which often requires increased mobility of surface atoms during the deposition process. These conditions are often achieved either by increasing the thermal motion of the surface atoms via heating or by momentum transfer to the surface by ion bombardment. The latter allows the deposition temperature to be significantly decreased. The three key parameters governing the structure and properties of sputtered coatings are the homologous temperature, the energy of bombarding ions and the flux ratio of bombarding ions to depositing atoms. The flux and energy of the charged bombarding species depend on the nature of the plasma sheath at the substrate. Therefore it is ultimately the plasma properties that determine the coating structure and properties.

There are at least two ways for plasma analysis: 1. study of the optical emission of low temperature plasma inside the sputtering chamber; 2. mass/energy spectroscopy of ionization vapor. Analysis of the applicability of these two methods to the control of the deposition processes and the nano-/microstructure of deposited coatings will be very useful.
We are looking for students who are interested to do their Bachelor project on this topic. You will gain your firsthand experience on magnetron sputtering deposition and in depth knowledge on optic spectrum and plasma diagnostics for magnetron sputtering deposition.

p7Fig: Plasma in front of a magnetron/target inside a sputtering chamber.

Contact:
Dr. Yutao Pei, kamer gebouw 13.020, e-mail: This e-mail address is being protected from spambots. You need JavaScript enabled to view it , Phone: 050-363 4344
Dr. David Vainchtein, kamer gebouw 13.022, e-mail: This e-mail address is being protected from spambots. You need JavaScript enabled to view it , Phone: 050 - 3634909
Prof.dr. J.Th. M. De Hosson, kamer gebouw 13.041, e-mail: This e-mail address is being protected from spambots. You need JavaScript enabled to view it